三分钟了解中微公司MOCVD设备Prismo UniMax®:
https://www.bilibili.com/video/BV1Ze4y177Fs/?spm_id_from=333.337.search-card.all.click&vd_source=b34f1918a36504407c353abfa90dc0e4
MOCVD制备GaN结晶过程动画解析
https://www.bilibili.com/video/BV1Qe4y1y7bM/?spm_id_from=333.337.search-card.all.click&vd_source=b34f1918a36504407c353abfa90dc0e4